Eiji Hayashi

Title: Eiji Hayashi: Innovator in Semiconductor Probing Technology

Introduction

Eiji Hayashi is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of semiconductor probing technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of probe apparatuses used in semiconductor manufacturing.

Latest Patents

Hayashi's latest patents include innovative designs for a probe apparatus and a wafer mounting table for probe apparatus. The probe apparatus features a card clamp unit that detachably supports a probe card, along with a wafer mounting table that adsorbs the semiconductor wafer and ensures that electrodes on the wafer make contact with the probes. This design accommodates semiconductor wafers with unique structural features, including an annular portion and a thin portion. The wafer mounting table is equipped with multiple circular vacuum chuck grooves that facilitate vacuum evacuation at various positions.

Another notable patent is the semiconductor wafer probing apparatus, which consists of an apparatus body and a detachable test head. This design includes a probe card with multiple probe needles that contact the semiconductor wafer. The test head is supported by engaging rods that distribute the load evenly, while a vertically movable work table allows for precise placement of the substrate. The support mechanisms enable adjustments to the inclination of the probe card, enhancing the overall probing process.

Career Highlights

Eiji Hayashi is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has been instrumental in advancing probing technologies that are critical for semiconductor testing and manufacturing.

Collaborations

Hayashi has collaborated with notable coworkers, including Tadashi Obikane and Ryoichiro Koshi. Their combined expertise has contributed to the development of innovative solutions in semiconductor probing.

Conclusion

Eiji Hayashi's contributions to semiconductor probing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the efficiency of semiconductor manufacturing processes.