This inventor holds 1 USPTO granted patent. Top assignee: International Business Machines Corporation. Active years: 1996.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1996
Title: Edward T. Smith and Rim-Type Phase-Shift Mask Technology
Introduction
Edward T. Smith is an inventor associated with Somerville, Massachusetts, and International Business Machines Corporation. His patent work addresses a method for producing a rim-type phase-shift mask used in lithography.
Latest Patents
Smith is credited with 1 patent: “Method of Making a Rim-Type Phase-Shift Mask.” The invention describes exposing a positive resist layer from the backside of a mask substrate, activating selected areas near the edges of a patterned light-blocking layer. After development, the resulting resist pattern guides anisotropic etching of the uncovered light-blocking material, creating the desired rim structure.
Career Highlights
Smith’s recorded patent contribution concerns mask fabrication for phase-shift lithography. The method uses backside exposure and controlled etching to form a rim in the light-blocking layer.
Collaborations
The patent lists Stanislav P. Bajuk and David S. O’Grady among Smith’s coworkers.
Conclusion
Edward T. Smith’s patent documents a specific approach to forming rim-type phase-shift masks, reflecting his association with IBM and collaboration with fellow contributors.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile