Shanghai, China

Dong Ruan


 

Average Co-Inventor Count = 2.9

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2020-2022

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2 patents (USPTO):Explore Patents

Title: Innovations by Dong Ruan

Introduction

Dong Ruan is a notable inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor manufacturing through his innovative patents. With a total of 2 patents, Ruan has developed technologies that enhance the efficiency and effectiveness of substrate transfer and wafer processing.

Latest Patents

Ruan's latest patents include a substrate transfer device, transfer method, and photolithography apparatus. This invention features a motion platform with multiple transfer stages arranged side-by-side, allowing for the efficient transfer of substrates in a perpendicular direction. The device is designed to include a pre-alignment assembly that facilitates positional adjustments of the substrates during the transfer process.

Another significant patent is a wafer processing apparatus and method that focuses on pre-alignment and edge exposure of wafers. This apparatus comprises several modules, including a pre-alignment module, edge exposure module, motion module, control module, and a rotary table. The design reduces the complexity of control and system structure, simplifying the pre-alignment operation and lowering equipment costs.

Career Highlights

Dong Ruan has worked with prominent companies in the semiconductor industry, including Shanghai Micro Electronics Equipment Co., Ltd. and Shanghai Micro Electronics Equipment (Group) Co., Ltd. His experience in these organizations has contributed to his expertise in developing innovative solutions for wafer processing and substrate transfer.

Collaborations

Ruan has collaborated with notable colleagues such as Gang Wang and Cuixia Tian. Their teamwork has likely played a role in advancing the technologies that Ruan has patented.

Conclusion

Dong Ruan's contributions to the field of semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry and improve manufacturing processes.

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