This inventor holds 1 USPTO granted patent. Top assignee: Kla Instruments Corporation. Active years: 1990.
Company Filing History:
Years Active: 1990
Title: The Innovative Mind of Donald L. Danielson
Introduction
Donald L. Danielson is a notable inventor based in Palo Alto, California. He has made significant contributions to the field of optical inspection systems, particularly in the semiconductor industry. His innovative work has led to the development of advanced technologies that enhance the accuracy and efficiency of reticle inspections.
Latest Patents
Donald L. Danielson holds a patent for a "Reticle Inspection System." This automatic inspection system includes an illuminator that illuminates a reticle or photomask to be inspected. It optically projects a magnified image of the reticle or photomask onto a plurality of detector elements. A carriage assembly moves the object at a constant velocity, allowing the detector elements to sequentially view the entire surface to be inspected. The detector elements respond to the intensity of light incident upon them and are periodically scanned to obtain a two-dimensional measured representation of the object. A database adaptor formulates a two-dimensional representation from the design database description corresponding to the scanned object simultaneously and in synchronism with the scanning of the photomask or reticle. The measured and database-adapted representation of the scanned object are input to a signal processor for alignment and defect detection. An alignment circuit dynamically measures and corrects for misalignment between the representations, enabling effective comparison for defects.
Career Highlights
Donald L. Danielson has had a distinguished career, working with Kla Instruments Corporation, where he has been instrumental in developing cutting-edge inspection technologies. His work has significantly impacted the efficiency of semiconductor manufacturing processes.
Collaborations
Throughout his career, Donald has collaborated with talented individuals such as Mark Joseph Wihl and David A. Joseph. These collaborations have fostered innovation and contributed to the advancement of optical inspection systems.
Conclusion
Donald L. Danielson's contributions to the field of reticle inspection systems exemplify his innovative spirit and dedication to advancing technology. His work continues to influence the semiconductor industry, ensuring higher standards of quality and efficiency.