This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials Israel Limited. Active years: 2010.
Company Filing History:
Years Active: 2010
Title: The Innovations of Dimitry Shur
Introduction
Dimitry Shur is an accomplished inventor based in Holon, Israel. He has made significant contributions to the field of technology, particularly in the area of overlay error measurement. His work is recognized for its innovative approach and practical applications in various industries.
Latest Patents
Dimitry holds a patent for a "System and method for measuring overlay errors." This invention involves a method that directs a primary electron beam to interact with an inspected object. The inspected object consists of a first feature formed on a first layer and a second feature on a second layer, where the second feature is buried under the first layer. This method detects overlay errors by analyzing the shape of the area of the first layer affected by the buried feature. The process includes detecting electrons that are reflected or scattered from the area and receiving detection signals from at least one detector to determine overlay errors.
Career Highlights
Dimitry Shur is currently employed at Applied Materials Israel Limited, where he continues to develop innovative solutions in the field of technology. His expertise and dedication have made him a valuable asset to the company.
Collaborations
Dimitry collaborates with Alexander Kadyshevitch, working together to advance their projects and contribute to the field of technology.
Conclusion
Dimitry Shur's contributions to the field of overlay error measurement exemplify the spirit of innovation. His patent and ongoing work at Applied Materials Israel Limited highlight his commitment to advancing technology.