Deok Cheon Son

Title: Deok Cheon Son and Semiconductor Manufacturing Innovation.

Introduction

Deok Cheon Son is an inventor associated with Hwaseong, South Korea, and Samsung Electronics Ltd. His patent work concerns substrate treatment equipment and methods for manufacturing semiconductor devices.

Latest Patents

The provided information lists one patent for Son: “Substrate Treatment Apparatus and Semiconductor Device Manufacturing Method Using the Same.” The invention describes loading a substrate into a treatment apparatus, depositing material on it, and cleaning the apparatus. The apparatus includes a housing with a treatment area, a gas supply, a remote plasma supply, and a shower head. The gas supply delivers a first process gas at a flow rate of 1,000 to 15,000 sccm, as well as a second process gas. The remote plasma supply applies radio-frequency power to generate plasmas from the gases, and the shower head delivers those plasmas to the treatment area. The second process plasma is used to clean membrane material deposited on the housing’s inner wall. Son is credited with 1 patent in the information provided.

Career Highlights

Son’s listed patent reflects work on semiconductor manufacturing processes, particularly deposition and in-situ cleaning of treatment equipment. The approach integrates plasma generation and delivery into an apparatus designed to process substrates and remove deposited material from its interior surfaces.

Collaborations

The provided information identifies Woo Hyun Lee and Su Ji Gim as Son’s coworkers. It does not specify their roles in the patent or describe the nature of their collaboration.

Conclusion

Deok Cheon Son’s listed patent focuses on combining substrate deposition with plasma-based equipment cleaning, addressing an important operational aspect of semiconductor manufacturing.