Company Filing History:
Years Active: 2002-2012
Title: Innovations and Contributions of Dennis J. Yost
Introduction
Dennis J. Yost is a notable inventor based in Los Gatos, California. He has made significant contributions to the field of micro-electromechanical systems (MEMS) and semiconductor fabrication. With a total of nine patents to his name, Yost has demonstrated a commitment to advancing technology through innovative solutions.
Latest Patents
Among his latest patents is a CMP process flow for MEMS. This invention relates to the formation of a MEMS cantilever switch within a complementary metal oxide semiconductor (CMOS) back end of the line (BEOL) process. The cantilever switch is designed to be in electrical communication with a lower electrode, which can be either blanket deposited and patterned or deposited in vias or trenches. The excess material for the lower electrode is planarized using chemical mechanical polishing (CMP). Another significant patent involves cleaning submicron structures on a semiconductor wafer surface. This patent describes cleaning solutions and methods tailored to specific substrates and structures in semiconductor fabrication. It includes a method for cleaning fragile structures with dimensions less than 0.15 um using a cleaning solution with a surface tension lower than water, while applying acoustic energy to the substrate.
Career Highlights
Dennis J. Yost has worked with prominent companies in the technology sector, including Applied Materials, Inc. and Cavendish Kinetics Limited. His experience in these organizations has allowed him to contribute to various innovative projects and advancements in semiconductor technology.
Collaborations
Throughout his career, Yost has collaborated with notable professionals in the field, including Claes H. Bjorkman and Hongquing Shan. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies.
Conclusion
Dennis J. Yost's contributions to the field of MEMS and semiconductor fabrication are noteworthy. His innovative patents and collaborations reflect his dedication to advancing technology. His work continues to influence the industry and inspire future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.