Denis Bolshukhin

Title: Denis Bolshukhin: Innovator in High-Energy Radiation Measurement

Introduction

Denis Bolshukhin is a notable inventor based in Goettingen, Germany. He has made significant contributions to the field of high-energy radiation measurement, holding a total of 3 patents. His work focuses on innovative methods for measuring and adjusting beam bundles of high-energy radiation, particularly in applications such as semiconductor lithography.

Latest Patents

One of his latest patents is a method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensity. This method allows for the spatial acquisition of measurement data over a cross section of a high-energy, high-intensity radiation beam bundle without impairing measuring accuracy due to saturation or degradation of detectors. The process involves imaging an entire cross section of the beam bundle on a shading element, which is then separated into partial beam bundles with reduced cross sections and intensity through the movement of at least one opening. Measurement values of the partial beam bundles passing through the opening are temporally and spatially associated with the positions of the opening.

Another significant patent by Bolshukhin is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma. This invention focuses on acquiring and adjusting the characteristics of the beam bundle for applications in semiconductor lithography. It involves acquiring an intensity distribution of the radiation over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis. Intensity values are recorded in defined sectors for various reception regions of a measuring device, which are aligned with different radii concentric to the optical axis. Measured quantities and control variables are determined from a comparison of the intensity values of different sectors to align the collector optics effectively.

Career Highlights

Throughout his career, Denis Bolshukhin has worked with several companies, including Xtreme Technologies GmbH and Ushio Denki Kabushiki Kaisha. His experience in these organizations has contributed to his expertise in high-energy radiation technologies.

Collaborations

Denis has collaborated with notable professionals in his field, including Max Christian Schuermann and Juergen Kleinschmidt. These collaborations have further enhanced his innovative work and contributions to high-energy radiation measurement.

Conclusion

Denis Bolshukhin is a distinguished inventor whose work in high-energy radiation measurement