Company Filing History:
Years Active: 1996
Title: **Innovator Spotlight: Dean Walters and His Electron Beam Inspection System**
Introduction
Dean Walters, an innovative inventor based in Napierville, IL, has made significant contributions to the field of particle scanning systems. With one patent to his name, Walters combines technical expertise with creative problem-solving to enhance inspection methods in various applications.
Latest Patents
Walters is credited with the patent for an "Electron Beam Inspection System and Method." This invention outlines several embodiments of methods and apparatuses designed for particle scanning systems and automatic inspection systems. The core principle involves directing a particle beam at the surface of a substrate to facilitate its scanning. The system employs multiple detectors to identify secondary particles, back-scattered particles, and transmitted particles from the substrate. The substrate is mounted on an x-y stage, allowing for at least one degree of freedom during scanning. Additionally, the system subjects the substrate to an electric field to accelerate secondary particles. Notably, it maintains precise positional accuracy between the substrate and the charged particle beam, utilizing optical alignment means for initial setup. The vacuum means incorporated into the design enables efficient evacuation and repressurization of the chamber containing the substrates, optimizing the inspection process.
Career Highlights
Dean Walters is affiliated with Kla Instruments Corporation, where he utilizes his skills and knowledge in developing advanced inspection technologies. His patent stands as a testament to his ability to innovate and push the boundaries of what is possible in the realm of particle scanning and inspection systems.
Collaborations
Walters collaborates with talented colleagues, including Dan Meisburger and Alan D Brodie, who share his passion for innovation. Together, they contribute to the development of cutting-edge technologies that improve manufacturing and inspection processes across various industries.
Conclusion
Dean Walters exemplifies the spirit of innovation through his work in the field of electron beam inspection. His patent not only advances the technology but also reflects his commitment to enhancing inspection methodologies. As technology continues to evolve, inventors like Walters play a pivotal role in shaping the future of the industry with their groundbreaking contributions.