Company Filing History:
Years Active: 2019-2024
Title: De-Chen Tseng: Innovator in Photolithography
Introduction
De-Chen Tseng is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of photolithography, holding a total of five patents. His work focuses on advancing methods and apparatuses that enhance the efficiency and effectiveness of lithographic exposure processes.
Latest Patents
One of his latest patents is titled "Method and apparatus for dynamic lithographic exposure." This patent describes a method for developing a photosensitive material by forming it over a substrate. The method involves exposing the photosensitive material to electromagnetic radiation that is focused at various heights above the substrate. These heights are vertically separated and arranged along a vertical path that is perpendicular to the upper surface of the photosensitive material. The developed photosensitive material allows for the removal of a soluble region. Another patent under the same title details a photolithography tool that includes a source for generating electromagnetic radiation. This tool features a dynamic focal system that provides electromagnetic radiation to multiple vertical positions over a substrate stage, enhancing the depth of focus for improved lithographic results.
Career Highlights
De-Chen Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work in photolithography has positioned him as a key figure in the development of advanced manufacturing techniques.
Collaborations
Throughout his career, Tseng has collaborated with notable colleagues, including Jun-Yih Yu and De-Fang Huang. These partnerships have contributed to the advancement of technologies in the semiconductor field.
Conclusion
De-Chen Tseng's contributions to photolithography and his innovative patents reflect his expertise and dedication to advancing technology in the semiconductor industry. His work continues to influence the field and drive progress in manufacturing processes.