David W Mytton

Title: David W Mytton: Innovator in Gold Metallization Etching

Introduction

David W Mytton is an esteemed inventor based in Palo Alto, CA, specializing in advanced etching methods for semiconductor applications. With a total of two patents to his name, his innovative contributions have significantly impacted the field of plasma processing technology.

Latest Patents

David's latest patents focus on a method and apparatus for etching a gold metal layer using a titanium hardmask. This inventive method involves introducing a substrate with a gold layer and a titanium hardmask into a plasma processing chamber. The hardmask is first etched through conventional techniques, followed by the formation of a plasma from an oxidizing gas and an etching gas. The etching gas is typically a hydrochloric acid-containing gas, which may also include chlorine-containing components. The resulting plasma efficiently etches the gold layer through the titanium hardmask, showcasing David’s expertise in material processing.

Career Highlights

David is currently employed at Lam Research Corporation, a prominent player in the semiconductor industry known for its innovative technologies and solutions. His work is vital to the company’s ambitions in advancing semiconductor fabrication processes and enhancing device performance.

Collaborations

Throughout his career, David has collaborated with notable colleagues, including Gladys So-Wan Lo and Greg Goldspring. These collaborations not only enhance his research efforts but also support the development of cutting-edge technologies within the organization.

Conclusion

David W Mytton exemplifies the spirit of innovation in the semiconductor industry through his groundbreaking patents and collaborative efforts. His contributions continue to propel advancements in gold metallization etching, ensuring that Lam Research Corporation remains at the forefront of technological evolution.