Andover, MA, United States of America

David Palmer


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 1985

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1 patent (USPTO):Explore Patents

Title: David Palmer - Innovator in Semiconductor Technology

Introduction

David Palmer is a notable inventor based in Andover, MA (US). He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent.

Latest Patents

David Palmer holds a patent for an "Apparatus for vapor sheathed baking of semiconductor wafers." This invention involves a heat treating apparatus where semiconductor wafers are baked on a circular hot plate while being sheathed with a uniform vapor flow. The preferred vapor used in this process is a mixture of a relatively large volume of nitrogen carrying a relatively small volume of HMDS. After passing over the wafer, the vapor sheath is drawn through an annular gap into an exhaust chamber that surrounds and underlies the hot plate. This design effectively avoids heat and vapor loss into other portions of the semiconductor fabrication line, enhancing efficiency.

Career Highlights

Throughout his career, David Palmer has demonstrated a commitment to advancing semiconductor technology. His innovative approach to vapor sheathed baking has positioned him as a key figure in the industry. He is associated with GCA Corporation, where he continues to contribute to the development of cutting-edge technologies.

Collaborations

David has worked alongside talented individuals such as John Blechschmid and Richard D Coyne. Their collaborative efforts have furthered advancements in semiconductor processing techniques.

Conclusion

David Palmer's contributions to semiconductor technology through his innovative patent reflect his expertise and dedication to the field. His work continues to influence the industry and pave the way for future advancements.

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