This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Kla Tencor Corporation. Active years: 2011.
Company Filing History:
Years Active: 2011
Title: David Lidsky: Innovator in Optical Measurement Technologies
Introduction
David Lidsky is a notable inventor based in San Jose, CA. He has made significant contributions to the field of optical measurement technologies. His work primarily focuses on methods and apparatus for measuring optical azimuth angles in scatterometry tools.
Latest Patents
David Lidsky holds a patent for "Azimuth angle measurement." This patent describes methods and apparatus for measuring an optical azimuth angle (φ) of a substrate relative to a plane of detection in scatterometry tools. The invention involves illuminating a grating target on a stage of a scatterometry tool and observing the positions of the resulting diffraction orders. The optical azimuth angle can be determined from these positions. Additionally, the patent discusses measuring polarization-dependent signals of radiation scattered from a line grating for equal and opposite polarization angles +A and -A. A combination signal is computed from these polarization-dependent signals, allowing for the calculation of a property of the combination signal for several mechanical azimuth angles (φ). This relationship between the optical and mechanical azimuth angles is determined from the behavior of the property as a function of the mechanical azimuth angle.
Career Highlights
David Lidsky is associated with Kla Tencor Corporation, where he has been instrumental in advancing optical measurement technologies. His innovative approach has led to the development of tools that enhance the accuracy of azimuth angle measurements.
Collaborations
David has collaborated with notable colleagues such as Shankar Krishnan and Haixing Zhou. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
David Lidsky's contributions to optical measurement technologies exemplify the impact of innovation in the field. His patent on azimuth angle measurement showcases his commitment to advancing scientific understanding and practical applications.