David J Harra

Title: David J Harra: Innovator in Sputtering Technology

Introduction

David J Harra, a distinguished inventor based in Santa Cruz, CA, has made significant contributions to the field of sputtering technology, holding a remarkable portfolio of nine patents. His innovative works focus primarily on enhancing the efficiency and effectiveness of magnetron sputtering apparatus, which are essential in various applications, including semiconductor manufacturing.

Latest Patents

Among his notable inventions, two patents stand out for their advanced features and applications. The first, titled "Sputtering apparatus having a rotating magnet array and fixed," introduces a magnetron sputter apparatus that includes a rotatable, heart-shaped, closed-loop magnet array. This unique design is optimized to produce sputtered films on planar substrates, ensuring desired characteristics such as uniformity of thickness and good step coverage. The apparatus employs stationary electromagnets that boost target utilization and maintain efficiency even as the target depletes.

The second patent, titled "Sputtering apparatus with a magnet array having a geometry for obtaining a desired sputter target erosion profile," presents a rotatable magnet configuration tailored for achieving a specific sputter target erosion profile. This design compensates for the differences between the actual and effective positions of the magnet, ensuring optimal film characteristics through thorough design methods and analysis.

Career Highlights

David J Harra has built an impressive career at Varian Associates, Inc., where he has been able to apply his inventive talent to cutting-edge technologies. His work is not only integral to the company's growth but has also paved the way for advancements in sputtering apparatus that benefit numerous sectors dependent on high-quality thin films.

Collaborations

Throughout his career, Harra has collaborated with esteemed colleagues such as Frederick T Turner and Martin A Hutchinson, enhancing his research and contributing to the collective knowledge in the field. These collaborations have resulted in innovative ideas and effective solutions that push the boundaries of sputtering technology.

Conclusion

David J Harra exemplifies the innovative spirit required to excel in the world of technology and invention. His dedication to advancing sputtering apparatus has not only earned him multiple patents but also made a lasting impact on the industry. As technology continues to evolve, the significance of his contributions remains evident, inspiring future advancements in sputtering and related fields.