Location History:
- Fremont, CA (US) (2002)
- Mt. Kisco, NY (US) (2001 - 2006)
- Mount Kisco, NY (US) (2007 - 2019)
Company Filing History:
Years Active: 2001-2019
Title: David J Cooperberg: Innovator in Plasma Processing Technologies
Introduction
David J Cooperberg is a prominent inventor based in Mount Kisco, NY, renowned for his significant contributions to plasma processing technologies. With an impressive portfolio of 12 patents, Cooperberg continues to lead innovations that enhance processes essential to the semiconductor industry.
Latest Patents
Cooperberg's most recent inventions include a tunable multi-zone gas injection system designed for plasma processing systems utilized in the treatment of substrates such as semiconductor wafers. This sophisticated injector features an on-axis outlet that supplies process gas at a first flow rate to a central zone and off-axis outlets delivering the same gas at a second flow rate to an annular zone surrounding the central zone. This innovative arrangement allows for precise modifications in gas delivery, catering to various processing regimes by enabling independent adjustment of gas flow to multiple zones within the chamber. Furthermore, compared to traditional consumable showerhead arrangements, the removably mounted gas injector offers a more economical and user-friendly solution for replacements.
Career Highlights
David J Cooperberg is currently associated with Lam Research Corporation, where he applies his expertise to advance technologies in semiconductor manufacturing. His prolific patent portfolio underscores his ability to address complex challenges in plasma processing, advancing the capabilities of the industry.
Collaborations
Throughout his career, Cooperberg has collaborated with notable professionals such as Vahid Vahedi and Neil M Benjamin. Together, they contribute to the development of innovative solutions that push the boundaries of current technology in the field.
Conclusion
David J Cooperberg's work exemplifies the spirit of innovation within the technology sector. His ongoing dedication to advancing plasma processing ensures that he remains a pivotal figure in shaping the future of semiconductor manufacturing. As he continues to develop groundbreaking technologies, the industry watches keenly for his contributions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.