Marblehead, MA, United States of America

David Felsenthal

USPTO Granted Patents = 7 

Average Co-Inventor Count = 3.1

ph-index = 5

Forward Citations = 97(Granted Patents)


Company Filing History:


Years Active: 2001-2015

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7 patents (USPTO):

Title: David Felsenthal: Innovator in Substrate Processing Technologies

Introduction

David Felsenthal, located in Marblehead, MA, has made significant contributions to the field of substrate processing with a total of seven patents to his name. His innovative spirit and dedication to advancing technology are evident in his latest inventions, which are set to enhance the efficiency of substrate handling and cooling processes.

Latest Patents

Felsenthal's latest patents include the "Substrate Processing Pallet with Cooling" and the "Ultra-Thin Wafer Handling System." The Substrate Processing Pallet features a base member and an interface pad designed to facilitate the cooling of substrates, significantly improving their processing. This pallet includes an electrostatic chuck that grips the substrate during processing, alongside an energy storage system ensuring enough charge is maintained for effective grip. Additionally, it incorporates a gas conduit that aids in cooling the substrate's backside.

The Ultra-Thin Wafer Handling System introduces an improved Bernoulli end effector that is specifically tailored for holding and transporting ultra-thin substrates. This system enhances positioning through edge guides and employs friction pads to prevent unintended motion during handling. The Bernoulli end effector supports a method for processing both surfaces of the substrate, ensuring that ultra-thin substrates remain stable without bowing during processing.

Career Highlights

David Felsenthal has had an accomplished career, having worked with notable companies like Nexx Systems Packaging, LLC and Nexx Systems, Inc. His roles in these organizations allowed him to dive deep into the intricacies of substrate technology and develop practical solutions to complex problems.

Collaborations

Felsenthal's journey is marked by significant collaborations with industry peers. Among them are Piero Sferlazzo and Martin P. Klein, both of whom have complemented his work through their unique expertise. These partnerships have led to innovative developments in substrate processing techniques, furthering the field's advancements.

Conclusion

David Felsenthal's contributions to substrate processing technologies reflect his commitment to innovation and excellence in the field. With seven patents that showcase his inventive skills, he continues to influence how substrates are processed and handled, making a lasting impact on the industry. His ongoing efforts promise to lead to even more innovations in the future.

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