David Chen

Title: David Chen: Innovator in Electron Beam Inspection Technology

Introduction

David Chen is a notable inventor based in Portland, OR (US). He has made significant contributions to the field of electron beam inspection technology. With a total of 2 patents to his name, Chen's work is recognized for its innovative approach to scanning samples.

Latest Patents

One of David Chen's latest patents is titled "Method and system for adaptively scanning a sample during electron beam inspection." This patent describes a system designed for adaptive electron beam scanning, which includes an inspection sub-system that scans an electron beam across the surface of a sample. The system comprises an electron beam source, a sample stage, a set of electron-optic elements, a detector assembly, and a controller that is communicatively coupled to various components of the inspection sub-system. The controller assesses characteristics of the sample area for inspection and adjusts scan parameters accordingly.

Career Highlights

David Chen is currently employed at KLA-Tencor Corporation, a leading company in the field of semiconductor process control and yield management. His work at KLA-Tencor has allowed him to further develop his expertise in electron beam inspection technologies.

Collaborations

Throughout his career, David has collaborated with talented individuals such as Gary Fan and Vivekanand Kini. These collaborations have contributed to the advancement of innovative technologies in their field.

Conclusion

David Chen's contributions to electron beam inspection technology highlight his role as an influential inventor. His patents and work at KLA-Tencor Corporation demonstrate his commitment to innovation and excellence in the field.