Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (2 from 1,787 patents)
2 patents:
1. 9734987 - Method and system for adaptively scanning a sample during electron beam inspection
2. 9257260 - Method and system for adaptively scanning a sample during electron beam inspection