Company Filing History:
1 out of 13,726 
1 out of 916 
Years Active: 2012-2024
Title: The Innovations of David Burgdorf
Introduction
David Burgdorf is an accomplished inventor based in Rockport, MA (US). He holds two patents that showcase his expertise in the field of ion sources and workpiece support cleaning methods. His innovative contributions have made a significant impact in the semiconductor industry.
Latest Patents
One of Burgdorf's latest patents is for a "Shield for filament in an ion source." This invention involves a Bernas ion source that features a shield positioned between the filament and the chamber's first end. The shield serves to confine the plasma, potentially allowing for denser plasmas to be generated within the chamber. It may be electrically connected to the negative leg of the filament, reducing back heating and the risk of thermal runaway. The shield is typically made of a refractory metal, enhancing its durability and effectiveness.
Another notable patent is the "Platen cleaning method." This method involves using a specially coated workpiece that, when placed on a support, removes particles from the support upon its removal. The workpiece can undergo an ion implantation process to increase its temperature and enhance the tackiness of the coating. Various materials, including photoresists, oxides, and deposited glasses, can be used for the coating, making this method versatile and effective.
Career Highlights
Burgdorf has worked with prominent companies in the semiconductor industry, including Applied Materials, Inc. and Varian Semiconductor Equipment Associates, Inc. His experience in these organizations has contributed to his innovative mindset and technical expertise.
Collaborations
Throughout his career, Burgdorf has collaborated with notable professionals, including Klaus Becker and Luigi G Amato. These collaborations have likely enriched his work and led to further advancements in his inventions.
Conclusion
David Burgdorf's contributions to the field of semiconductor technology through his patents and career experiences highlight his role as a significant inventor. His innovative methods and designs continue to influence the industry and pave the way for future advancements.