Dave Shaner

Title: The Innovative Contributions of Dave Shaner

Introduction

Dave Shaner is a notable inventor based in Georgetown, MA (US). He has made significant contributions to the field of workpiece support technology. With a focus on enhancing backside contamination performance, his innovations have the potential to impact various industries.

Latest Patents

Dave Shaner holds a patent for a "Substrate support having customizable and replaceable features for enhanced backside contamination performance." This invention features a workpiece support with a support surface where one or more standoffs are selectively removably coupled. These standoffs are designed to support a workpiece at a predetermined distance from the support surface, creating a gap that can be utilized for various applications. The standoffs may consist of an electrically insulative film, such as polyimide, which is coupled to the support surface by an adhesive. This workpiece support may also function as an electrostatic chuck (ESC), with electrodes positioned below the support surface to attract the workpiece electrostatically.

Career Highlights

Dave Shaner is currently employed at Axcelis Technologies, Inc., where he continues to develop innovative solutions in the field of semiconductor manufacturing. His work has contributed to advancements in technology that enhance the efficiency and effectiveness of workpiece support systems.

Collaborations

One of his notable coworkers is John F Baggett, with whom he collaborates on various projects within the company.

Conclusion

Dave Shaner's contributions to the field of workpiece support technology exemplify the importance of innovation in enhancing manufacturing processes. His patent and ongoing work at Axcelis Technologies, Inc. highlight his commitment to advancing technology in this area.