Location History:
- Mountain View, CA (US) (2000)
- Santa Clara, CA (US) (2004 - 2005)
Company Filing History:
Years Active: 2000-2005
Title: The Innovations of Daniel Owen Clawson
Introduction
Daniel Owen Clawson is a notable inventor based in Santa Clara, CA. He has made significant contributions to the field of substrate processing chambers, holding a total of three patents. His work focuses on enhancing the performance and durability of chamber components through innovative designs and materials.
Latest Patents
Clawson's latest patents include a "Chamber having components with textured surfaces and method of manufacture." This invention features a component for a substrate processing chamber composed of aluminum oxide, with a roughened surface that has a roughness average ranging from about 150 to about 450 microinches. A plasma sprayed ceramic coating of aluminum oxide is deposited on this roughened surface, which may serve as a dome-shaped ceiling of the chamber. Another patent, "Chamber components having textured surfaces and method of manufacture," describes a domed enclosure wall for a plasma processing chamber made from a dielectric material. This wall also has a roughened surface with similar roughness specifications and is designed to improve the adherence of sputtered material generated by plasma.
Career Highlights
Clawson is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to focus on developing advanced technologies that enhance the efficiency and effectiveness of processing chambers.
Collaborations
Throughout his career, Clawson has collaborated with esteemed colleagues such as Glen T Mori and Shyh-Nung Steve Lin. These collaborations have contributed to the advancement of technologies in the field of substrate processing.
Conclusion
Daniel Owen Clawson's innovative patents and contributions to the field of substrate processing chambers highlight his expertise and commitment to advancing technology. His work continues to influence the industry and improve the performance of processing equipment.