Daniel J Loop

Title: **Daniel J Loop: Innovator in Semiconductor Technology**

Introduction

Daniel J Loop is a prominent inventor based in Austin, TX, known for his contributions to semiconductor technology. With a patent portfolio that reflects his innovative spirit, Loop has made significant strides in enhancing the efficiency of semiconductor devices, particularly through his work at Motorola Corporation.

Latest Patents

Daniel J Loop holds a notable patent titled "Method of forming a semiconductor device barrier layer." This patent describes an innovative method for creating an improved copper inlaid interconnect. The process begins with an RF preclean operation on the inlaid structure within a designated chamber. This precleaning step is crucial as it rounds corners of the structure, thereby reducing voiding and enhancing step coverage, all while preserving the integrity of the underlying copper interconnect surfaces.

Subsequently, a tantalum barrier is deposited, with diverse tensile properties across different portions of the barrier layer. After successfully forming the barrier, a copper seed layer is applied atop the barrier layer. This step is carefully executed while clamping the wafer using an advanced clamp that minimizes copper peeling and contamination around the wafer edges. To finalize the copper interconnect structure, copper electroplating and chemical mechanical polishing processes are employed.

Career Highlights

Throughout his career at Motorola Corporation, Daniel has demonstrated a commitment to advancing semiconductor technology. His innovative techniques not only improve device performance but also address common challenges faced in the industry, such as voiding and edge contamination.

Collaborations

In his professional journey, Daniel has collaborated with talented coworkers such as Dean J Denning and Sam S Garcia. These partnerships highlight the collaborative spirit at Motorola Corporation, fostering an environment where cutting-edge semiconductor innovations can thrive.

Conclusion

Daniel J Loop's work stands out in the realm of semiconductor technology, marked by his inventive methodologies and collaborative efforts. As he continues to pave the way for advancements in this field, his contributions remain invaluable to both Motorola Corporation and the broader electronics industry.