Location History:
- Chiba-ken, JP (1998)
- Chiba, JP (2001)
Company Filing History:
Years Active: 1998-2001
Title: Innovations by Daisuke Tajima: Advancements in Plasma Processing Technology
Introduction
Daisuke Tajima, an accomplished inventor based in Chiba, Japan, has made significant contributions to the field of plasma processing technology. With two patents to his name, Tajima's work focuses primarily on the etching of various materials using innovative methods that enhance efficiency and effectiveness.
Latest Patents
Tajima's latest inventions include:
1. **Plasma processing of tungsten using a gas mixture comprising a fluorinated gas and oxygen**: This patent describes a method and apparatus for etching a substrate containing both a polysilicon layer and an overlying tungsten layer. The process involves using a plasma formed from a gas mixture of fluorinated gases (such as CF₄, NF₃, SF₆) and oxygen in a specially designed chamber.
2. **Plasma process for etching multicomponent alloys**: This patent outlines a method for etching multicomponent alloys on a substrate without leaving etchant residue. The method entails placing the substrate in a process chamber equipped with a plasma generator and electrodes. A specific gas mixture is introduced, which is ionized to form plasma ions that effectively etch the alloy at a high rate while maintaining substrate integrity.
Career Highlights
Daisuke Tajima works at Applied Materials, Inc., a leading company in the technology sector renowned for its innovations in materials engineering. His role involves conducting research and development on advanced plasma technologies that pave the way for new applications in semiconductor manufacturing and materials science.
Collaborations
Throughout his career, Tajima has collaborated with esteemed colleagues such as Katsuhisa Kugimiya and Takanori Nishizawa. Their combined expertise has contributed to the successful development of Tajima's patented technologies, showcasing the collaborative nature of innovation in the research and development community.
Conclusion
Daisuke Tajima's contributions to plasma processing technology underscore the importance of innovation in advancing industrial applications. His patents reflect a deep understanding of material science and engineering, positioning him as a notable figure in the field. With continuous advancements in technology, Tajima's work is poised to have a lasting impact on the industry.