Company Filing History:
Years Active: 2010-2013
Title: Innovations by Dae-han Choi
Introduction
Dae-han Choi is a notable inventor based in Fremont, CA, who has made significant contributions to the field of plasma processing technology. With a total of 2 patents, his work focuses on methods for depositing conformal films and enhancing critical dimension control in etching processes.
Latest Patents
One of Dae-han Choi's latest patents is titled "Apparatus for the deposition of a conformal film on a substrate and methods therefor." This patent describes a method for depositing a conformal film on a substrate within a plasma processing chamber. The process involves flowing a first gas mixture, which includes carbon, into the chamber at a specific pressure. The substrate is cooled below the condensation temperature, allowing the gas mixture to condense on its surface. Following this, a second gas mixture is introduced, and plasma is struck to form the conformal film.
Another significant patent is "Critical dimension reduction and roughness control." This invention outlines a method for forming features in an etch layer. It involves creating a photoresist layer, patterning it to form features, and depositing a conformal layer to reduce the critical dimensions of these features. The control layer is designed to be more etch-resistant, ensuring precision in the etching process.
Career Highlights
Dae-han Choi is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that enhance the efficiency and effectiveness of plasma processing technologies.
Collaborations
Dae-han collaborates with talented coworkers, including Sangheon Lee and Jisoo Kim. Their combined expertise contributes to the advancement of technologies in their field.
Conclusion
Dae-han Choi's contributions to plasma processing technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor. His innovative methods continue to shape the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.