Location History:
- New Taipei, TW (2013)
- Hsinchu Science Park, TW (2016)
Company Filing History:
Years Active: 2013-2016
Title: Da-Ren Liu: Innovator in Plasma Technology
Introduction
Da-Ren Liu is a prominent inventor based in Hsinchu Science Park, Taiwan. He has made significant contributions to the field of plasma technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of thin film deposition processes.
Latest Patents
One of Da-Ren Liu's latest patents is a Plasma Enhanced Atomic Layer Deposition (PEALD) system. This innovative system is designed to form thin films on substrates and includes a plasma chamber, a processing chamber, two or more ring units, and a control piece. The plasma chamber consists of outer and inner quartz tubular units, which are aligned to hold and concentrate plasma in an annular space. This design allows for a more even distribution of plasma flow across the substrate, resulting in uniformly distributed thin films and nanoparticles. Additionally, the alignment of the through holes in the plasma chamber enables precise control over the plasma's entry into the processing chamber, preventing unwanted chemical vapor deposition (CVD).
Another notable patent is a mechanism with a component position adjusting function. This invention features a drive unit, a drive shaft, a plate body, a drive wheel, at least one passive component, and a brake. The drive unit facilitates forward or reverse rotation, driving the shaft to rotate and synchronously moving the plate body and drive wheel. The passive component interacts with the drive shaft, while the brake ensures the plate body remains stationary during operation.
Career Highlights
Da-Ren Liu is currently employed at the National Applied Research Laboratories, where he continues to advance his research and development efforts in plasma technology. His innovative work has positioned him as a key figure in the field, contributing to advancements that have practical applications in various industries.
Collaborations
Some of Da-Ren Liu's coworkers include Bo-Heng Liu and Chi-Chung Kei, who collaborate with him on various projects and research initiatives.
Conclusion
Da-Ren Liu's contributions to plasma technology through his patents and work at the National Applied Research Laboratories highlight his role as an influential inventor. His innovative approaches to thin film deposition and component adjustment mechanisms continue to impact the field positively.
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