National Applied Research Laboratories

Da-Ren Liu

Chien-Nan Hsiao

Chi-Chung Kei

Chun-Jen Weng

Wen-Hao Cho

Bo-Heng Liu

Meng-Yen Tsai

Chih-Chieh Yu

Shian-Wen Chang

A plasma enhanced atomic layer deposition (PEALD) system used to form thin films on substrates includes a plasma chamber, a processing chamber, two or more ring units and a control piece. The plasma chamber includes an outer and an inner quartz tubular units, whose central axes are aligned with each other. Therefore, plasma is held and concentrated in an annular space formed between the outer and outer quartz tubular units. Due to the first and second through holes, the plasma flow may be more evenly distributed on most of the surface of the substrate to form evenly distributed thin films and nano particles on the substrate. In addition, due to the alignment and misalignment between the first and second through holes, the plasma generated in the plasma chamber may be swiftly allowed or disallowed to enter to the processing chamber to prevent the precursor from forming a CVD.

Plasma enhanced atomic layer deposition system

This invention discloses a mechanism with a component position adjusting function, comprising a drive unit, a drive shaft, a plate body, a drive wheel, at least one passive component and a brake. The drive unit performs a forward or reverse rotating shift and drives the drive shaft to rotate. The unidirectional component has a through hole, and disposes at the plate body. An end of the drive shaft is passed through the through hole and exposed from the plate body. The drive shaft synchronously drives the plate body and the drive wheel to rotate forward. The passive component is arranged at the plate body and contacted with the drive shaft with synchronously drives and rotates the passive component. The plate body remains still through the rotation of the unidirectional component and the contact of the brake with the plate body.

Mechanism with component position adjusting function

Growing community of inventors

Hsinchu Science Park, Taiwan

Da-Ren Liu