Craig A Bellows

Title: Innovations by Craig A Bellows

Introduction

Craig A Bellows is a notable inventor based in San Antonio, TX (US). He has made significant contributions to the field of integrated circuit manufacturing, holding a total of 4 patents. His work focuses on enhancing the reliability and efficiency of semiconductor processes.

Latest Patents

One of his latest patents is titled "IC interconnect formation with chemical-mechanical polishing and silica." This innovative method utilizes chemical-mechanical polishing (CMP) to planarize a nonplanar submetal silica dielectric layer. The process involves cleaning the planarized device with an aqueous solution of ammonium hydroxide and citric acid. Exposed hydrated silica is then etched using a mixture of nitric and hydrofluoric acids, effectively removing embedded contaminants from the CMP slurry. This method results in a more reliable integrated circuit manufacturing process.

Another significant patent is the "Semiconductor wafer manufacturing process with high-flow-rate." This patent describes a purge process for an LPCVD TEOS silicon dioxide deposition method. It employs a series of five purge cycles to minimize defects during wafer processing. The process begins with loading dummy wafers into the chamber and reducing the chamber pressure. This innovative approach enhances manufacturing throughput by reducing the frequency of chamber removal and cleaning.

Career Highlights

Craig A Bellows has made substantial advancements in semiconductor technology through his patents. His work at VLSI Technology, Inc. has positioned him as a key figure in the industry. His inventions have contributed to higher yields and improved reliability in integrated circuit manufacturing.

Collaborations

Craig has collaborated with notable coworkers, including Landon B Vines and Walter D Parmantie. Their combined expertise has furthered the development of innovative solutions in semiconductor manufacturing.

Conclusion

Craig A Bellows is a distinguished inventor whose work has significantly impacted the field of integrated circuit manufacturing. His innovative patents and contributions to VLSI Technology, Inc. demonstrate his commitment to advancing technology in the semiconductor industry.