Company Filing History:
Years Active: 2006-2009
Title: Innovator Spotlight: Corina Elena Tanasa from Mountain View, CA
Introduction: Corina Elena Tanasa is an accomplished inventor based in Mountain View, California. With a focus on enhancing thermal processing technologies, she has been instrumental in developing innovative solutions that improve manufacturing processes in the semiconductor industry. Corina holds two patents that showcase her expertise and creativity in the field.
Latest Patents: Corina's most recent patents include:
1. **Lamp Array for Thermal Processing Exhibiting Improved Radial Uniformity**: This invention features a thermal processing chamber that includes a substrate support which rotates about a central axis. It incorporates a lamphead with multiple lamps arranged in an array designed to provide a predetermined difference in radiance patterns. The innovative design improves the uniformity of heat distribution during the thermal processing of materials.
2. **Method and Apparatus for Low Temperature Pyrometry Useful for Thermally Processing Silicon Wafers**: This patent involves a rapid thermal processing (RTP) system that utilizes a transmission pyrometer to monitor the temperature-dependent absorption of silicon wafers. The invention delivers enhanced precision in thermal treatments, particularly in processes conducted below 500°C, by creating a look-up table correlating photodetector photocurrents with known temperatures.
Career Highlights: Corina works for Applied Materials, Inc., a leading provider of equipment and technologies in the semiconductor industry. Her contributions to the field have solidified her reputation as a skilled inventor dedicated to advancing thermal processing capabilities.
Collaborations: Throughout her career, Corina has collaborated with notable colleagues, including Aaron Muir Hunter and Rajesh S Ramanujam. These partnerships have played a crucial role in the development of her patented technologies, demonstrating the power of teamwork in driving innovation.
Conclusion: Corina Elena Tanasa continues to make significant strides in the domain of thermal processing through her inventive solutions. Her patents demonstrate a commitment to excellence and innovation, setting new benchmarks for the industry and inspiring future advancements in semiconductor manufacturing technologies.