The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2009
Filed:
Aug. 02, 2005
Joseph M. Ranish, San Jose, CA (US);
Corina E. Tanasa, Mountain View, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Claudia Lai, Sunnyvale, CA (US);
Ravi Jallepally, Santa Clara, CA (US);
Ramachandran Balasubramanian, Santa Clara, CA (US);
Aaron M. Hunter, Santa Cruz, CA (US);
Agus Tjandra, San Jose, CA (US);
Norman Tam, San Jose, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Corina E. Tanasa, Mountain View, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Claudia Lai, Sunnyvale, CA (US);
Ravi Jallepally, Santa Clara, CA (US);
Ramachandran Balasubramanian, Santa Clara, CA (US);
Aaron M. Hunter, Santa Cruz, CA (US);
Agus Tjandra, San Jose, CA (US);
Norman Tam, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A thermal processing chamber includes a substrate support rotating about a center axis and a lamphead of plural lamps in an array having a predetermined difference in radiance pattern between them. The radiance pattern includes a variation in diffuseness or collimation. In one embodiment, the center lines of all of the lamps are disposed away from the center axis. The array can be an hexagonal array, in which the center axis is located at a predetermined position between neighboring lamps.