Company Filing History:
Years Active: 2019-2020
Title: Colleen Lawlor: Innovator in Silicon Oxide Deposition Technologies
Introduction
Colleen Lawlor is a prominent inventor based in Clinton, NY (US), known for her significant contributions to the field of semiconductor manufacturing. With a total of two patents to her name, she has made strides in the selective growth of silicon oxide on various surfaces, particularly in the presence of copper.
Latest Patents
Colleen's latest patents focus on methods and apparatuses for selectively depositing silicon oxide on dielectric surfaces and metal-containing surfaces such as copper. One of her patents describes a process that involves exposing a substrate with hydroxyl-terminated or dielectric surfaces and copper surfaces to a copper-blocking reagent, such as an alkyl thiol. This process allows for selective adsorption to the copper surface. Following this, the substrate is exposed to a silicon-containing precursor for depositing silicon oxide, and then to a weak oxidant gas, igniting a plasma or using water vapor to convert the adsorbed silicon-containing precursor into silicon oxide. Additionally, some methods include exposing the substrate to a reducing agent to mitigate any oxidized copper resulting from the weak oxidant gas exposure.
Career Highlights
Colleen Lawlor is currently employed at Lam Research Corporation, where she continues to innovate in the field of semiconductor technology. Her work has been instrumental in advancing methods for silicon oxide deposition, which is crucial for the performance and reliability of electronic devices.
Collaborations
Throughout her career, Colleen has collaborated with notable colleagues, including Dennis Michael Hausmann and Alexander R. Fox. These collaborations have further enriched her research and development efforts in the semiconductor industry.
Conclusion
Colleen Lawlor's contributions to the field of silicon oxide deposition are noteworthy, and her patents reflect her innovative spirit and technical expertise. Her work at Lam Research Corporation continues to influence advancements in semiconductor manufacturing.