Company Filing History:

8 out of 3,768

Lam Research Corporation

patents

3 out of 993

Novellus Systems Incorporated

patents

1 out of 12

Hanergy Holding Group Ltd.

patents

Years Active: 2004-2019

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12 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 10494717 - Anti-transient showerhead (2019-12-03),

2. 10107490 - Configurable liquid precursor vaporizer (2018-10-23),

3. 10023959 - Anti-transient showerhead (2018-07-17),

4. 9982341 - Modular vaporizer (2018-05-29),

5. 9863041 - Internally heated porous filter for defect reduction with liquid or solid precursors (2018-01-09),

6. 9758868 - Plasma suppression behind a showerhead through the use of increased pressure (2017-09-12),

7. 9605346 - Systems and methods for pressure-based liquid flow control (2017-03-28),

8. 9453614 - Systems and methods for cooling and removing reactants from a substrate processing chamber (2016-09-27),

9. 8690148 - Utilization of an air amplifier to remove sheets of paper from glass in an automated glass handler (2014-04-08),

10. 7993457 - Deposition sub-chamber with variable flow (2011-08-09),

11. 7737035 - Dual seal deposition process chamber and process (2010-06-15),

12. 6758591 - Mixing of materials in an integrated circuit manufacturing equipment (2004-07-06),

Title: Colin F Smith: Innovator in Semiconductor Processing Technologies

Introduction

Colin F Smith is a prominent inventor based in Half Moon Bay, California, known for his significant contributions to semiconductor processing technologies. With a total of 12 patents to his name, Smith has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents, the "Anti-transient showerhead" addresses the challenges of non-uniform gas delivery across wafer surfaces during semiconductor processing. This invention includes features designed to minimize gas flow transients within the showerhead, ensuring consistent performance. Another notable patent is the "Configurable liquid precursor vaporizer," which provides an improved method for vaporizing liquid precursors. This vaporizer incorporates channels with a high wall-area-to-cross-sectional-flow-area ratio and is equipped with heater elements that maintain optimal temperatures for vaporization. The design allows for the introduction of carrier gas at high speeds, facilitating the mechanical shearing of the precursor into droplets. Additionally, the vaporizer can be easily disassembled for cleaning and maintenance, making it a practical solution for manufacturers.

Career Highlights

Colin F Smith has had a distinguished career, working with leading companies in the semiconductor industry. He has been associated with Lam Research Corporation and Novellus Systems Incorporated, where he contributed to the development of advanced technologies that have shaped the industry.

Collaborations

Throughout his career

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