logo

For the Inventor, By the Inventor

Half Moon Bay, CA, United States of America

Colin F Smith

This inventor holds 12 USPTO granted patents and 1 published patent application. Top assignees: Lam Research Corporation, Novellus Systems Incorporated, Hanergy Holding Group Ltd.. Active years: 2004-2019.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Colin F Smith. Retrieved from https://idiyas.com/inventor/colin-f-smith

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 12 

% Patents Active = 100.0

Average Co-Inventor Count = 2.5

ph-index = 6

Forward Citations = 940(Granted Patents)


Company Filing History:

goldMedal8 out of 3,966 
 
Lam Research Corporation
 patents
silverMedal3 out of 993 
 
Novellus Systems Incorporated
 patents
bronzeMedal1 out of 12 
 
Hanergy Holding Group Ltd.
 patents

Years Active: 2004-2019

Loading Chart...
12 patents (USPTO):Explore Patents
1. 10494717 - Anti-transient showerhead (2019-12-03),
2. 10107490 - Configurable liquid precursor vaporizer (2018-10-23),
3. 10023959 - Anti-transient showerhead (2018-07-17),
4. 9982341 - Modular vaporizer (2018-05-29),
5. 9863041 - Internally heated porous filter for defect reduction with liquid or solid precursors (2018-01-09),
6. 9758868 - Plasma suppression behind a showerhead through the use of increased pressure (2017-09-12),
7. 9605346 - Systems and methods for pressure-based liquid flow control (2017-03-28),
8. 9453614 - Systems and methods for cooling and removing reactants from a substrate processing chamber (2016-09-27),
9. 8690148 - Utilization of an air amplifier to remove sheets of paper from glass in an automated glass handler (2014-04-08),
10. 7993457 - Deposition sub-chamber with variable flow (2011-08-09),
11. 7737035 - Dual seal deposition process chamber and process (2010-06-15),
12. 6758591 - Mixing of materials in an integrated circuit manufacturing equipment (2004-07-06),

Title: Colin F Smith: Innovator in Semiconductor Processing Technologies

Introduction

Colin F Smith is a prominent inventor based in Half Moon Bay, California, known for his significant contributions to semiconductor processing technologies. With a total of 12 patents to his name, Smith has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents, the "Anti-transient showerhead" addresses the challenges of non-uniform gas delivery across wafer surfaces during semiconductor processing. This invention includes features designed to minimize gas flow transients within the showerhead, ensuring consistent performance. Another notable patent is the "Configurable liquid precursor vaporizer," which provides an improved method for vaporizing liquid precursors. This vaporizer incorporates channels with a high wall-area-to-cross-sectional-flow-area ratio and is equipped with heater elements that maintain optimal temperatures for vaporization. The design allows for the introduction of carrier gas at high speeds, facilitating the mechanical shearing of the precursor into droplets. Additionally, the vaporizer can be easily disassembled for cleaning and maintenance, making it a practical solution for manufacturers.

Career Highlights

Colin F Smith has had a distinguished career, working with leading companies in the semiconductor industry. He has been associated with Lam Research Corporation and Novellus Systems Incorporated, where he contributed to the development of advanced technologies that have shaped the industry.

Collaborations

Throughout his career

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Loading…