The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Jan. 23, 2007
Applicants:
Peter Krotov, San Jose, CA (US);
Colin F. Smith, Half Moon Bay, CA (US);
Inventors:
Peter Krotov, San Jose, CA (US);
Colin F. Smith, Half Moon Bay, CA (US);
Assignee:
Novellus Systems, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/22 (2006.01); C23C 16/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and method for depositing film on a substrate includes a plurality of conduits that allow by-product and reactant gases to flow past the edge of a substrate. The apparatus and process of the present invention has several advantages for enhanced chamber performance, particularly for micro-volume chambers using pulsed deposition layer processes.