This inventor holds 2 USPTO granted patents. Top assignee: Cymer, Inc.. Active years: 2003-2006.
Company Filing History:
Years Active: 2003-2006
Title: Claudia A Hartmann: Innovator in Ultraviolet Laser Technology
Introduction
Claudia A Hartmann is a prominent inventor based in Mering, Germany. She has made significant contributions to the field of laser technology, particularly in the development of high repetition rate gas discharge lasers. With a total of 2 patents, her work has been instrumental in advancing rapid inspection processes in integrated circuit fabrication.
Latest Patents
One of her latest patents is a high repetition rate gas discharge laser with precise pulse timing control. This innovative laser is compact and modular, designed to operate as a light source for very rapid inspections of wafers in integrated circuit fabrication. It is also effective for reticle writing at high speeds. The preferred embodiment of this laser operates at pulse repetition rates of 1000 to 4000 Hz, making it suitable for continuous production line operation. It features a pulse control unit that ensures timing accuracy of less than 4 nanoseconds. The laser can be configured to work with various gas mixtures, producing ultraviolet light pulses at wavelengths of 248 nm, 197 nm, or 157 nm.
Career Highlights
Claudia A Hartmann is currently employed at Cymer, Inc., where she continues to innovate in the field of laser technology. Her expertise and dedication have positioned her as a key figure in her organization.
Collaborations
Throughout her career, Claudia has collaborated with notable colleagues, including Palash P Das and Jennan Yu. These partnerships have further enhanced her contributions to the field.
Conclusion
Claudia A Hartmann's work in developing advanced laser technologies has made a significant impact on the industry. Her innovative patents and collaborations reflect her commitment to excellence in the field of laser engineering.