Claude A Sands

Title: Claude A Sands: Innovator in Semiconductor Manufacturing

Introduction

Claude A Sands is a notable inventor based in Los Altos, California. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of chemical vapor deposition processes. His innovative work has led to advancements that enhance the efficiency and effectiveness of tungsten nitride deposition.

Latest Patents

Claude A Sands holds a patent for PECVD and CVD processes for WNx deposition. This patent focuses on improvements to chemical vapor deposition processes used for depositing tungsten nitride in semiconductor manufacturing. One of the key advancements involves using NF as a nitrogen source, with the introduction of plasma under controlled conditions to manage particle formation and reduce the temperature required for producing acceptable films. Additionally, his processes allow for the production of substantially pure tungsten through rapid thermal annealing of amorphous tungsten nitride at lower temperatures by utilizing hydrogen in the ambient atmosphere. Furthermore, he has developed methods to control particle formation and enhance step coverage when using NH as a nitrogen source by regulating the pressure during gas mixing and employing unique wall coating techniques.

Career Highlights

Throughout his career, Claude A Sands has demonstrated a commitment to innovation in semiconductor technology. His work has not only contributed to the advancement of deposition techniques but has also paved the way for more efficient manufacturing processes in the industry. His patent reflects a deep understanding of the complexities involved in semiconductor fabrication.

Collaborations

Claude has collaborated with notable professionals in the field, including Carl J Galewski and Hector Velasco. These collaborations have likely enriched his research and development efforts, leading to more robust and innovative solutions in semiconductor manufacturing.

Conclusion

Claude A Sands is a distinguished inventor whose contributions to semiconductor manufacturing have had a lasting impact. His innovative approaches to chemical vapor deposition processes continue to influence the industry, showcasing the importance of creativity and technical expertise in advancing technology.