Company Filing History:
Years Active: 2022-2025
Title: Innovations by Chunwei Song in Defect Detection Technologies
Introduction
Chunwei Song is a notable inventor based in Shanghai, China. He has made significant contributions to the field of defect detection technologies, holding 2 patents that showcase his innovative approaches. His work primarily focuses on methods and systems for identifying defects in various specimens.
Latest Patents
Chunwei Song's latest patents include groundbreaking methods for detecting defects on specimens. One of his patents involves a system that computes different candidate reference images from various combinations of images generated by an inspection subsystem. This system combines portions of these candidate reference images to create a final reference image, which is then utilized for defect detection. This method is particularly effective in areas with non-resolvable, repeating device patterns, such as cell regions.
Another patent addresses defect detection in array regions on specimens. This method determines the center of a page break in the output generated by an inspection subsystem. The page break separates cell regions that contain repeating patterned features. By identifying offsets between the centers of the page breaks, the method can detect defects in the array region by applying a defect detection method to the relevant portions of the output.
Career Highlights
Chunwei Song is currently employed at Kla Corporation, where he continues to develop innovative solutions in defect detection. His work has significantly advanced the capabilities of inspection systems in various applications.
Collaborations
Chunwei collaborates with talented coworkers, including Siqing Nie and Weifeng Zhou, who contribute to the innovative environment at Kla Corporation.
Conclusion
Chunwei Song's contributions to defect detection technologies demonstrate his expertise and commitment to innovation. His patents reflect a deep understanding of the challenges in this field and provide effective solutions for improving inspection processes.