Chungho Cho

Title: The Innovative Mind of Chungho Cho

Introduction

Chungho Cho is a notable inventor based in Suwon-si, South Korea, recognized for his contributions to the semiconductor industry. With an impressive tally of two patents, Cho has made significant strides in developing technologies that enhance semiconductor fabrication processes.

Latest Patents

Cho’s latest patents showcase his expertise in semiconductor device manufacturing. The first patent, titled "Apparatus and method fabricating semiconductor device," presents a novel method for fabricating semiconductor devices. This method involves seating a substrate on an electrostatic chuck, applying radio-frequency power to induce plasma, and generating a magnetic field using a ring-shaped magnet positioned above the chuck. The innovative design of the magnet and its relationship to the substrate radius serves to improve efficiency in the fabrication process.

The second patent, named "Substrate processing apparatus," outlines a substrate processing system that includes an electrostatic chuck for mounting a substrate and a surrounding ring with a first coupling groove. This apparatus features a first floating electrode with a tapered shape that enhances the mounting process, further refining substrate handling during manufacturing.

Career Highlights

Chungho Cho has been associated with Samsung Electronics Co., Ltd., one of the world's leading technology companies. His work at Samsung has brought forth innovative solutions that align with the company’s commitment to advancement in technology and efficiency in semiconductor devices. Cho's patents reflect his deep understanding of the complexities involved in substrate processing and semiconductor fabrication.

Collaborations

In his professional journey, Chungho Cho collaborates with talented individuals like Jinseok Lee and Kihong Cho, contributing to a collective effort to push the boundaries of semiconductor technology. These collaborations highlight the importance of teamwork in achieving exceptional innovation in the field.

Conclusion

In summary, Chungho Cho stands out as a brilliant inventor within the semiconductor industry, with his two significant patents laying the groundwork for future advancements in the field. His work at Samsung Electronics Co., Ltd. and collaborations with other innovators demonstrate the impact of working together to develop effective solutions for semiconductor processing challenges. Through his innovative methods and apparatus, Cho continues to influence the future of semiconductor technology.