This inventor holds 1 USPTO granted patent. Top assignee: Macronix International Co., Ltd.. Active years: 2004.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2004
Title: Chung-Te Tsai and Bubble Detection in Photoresist Systems.
Introduction
Chung-Te Tsai is an inventor associated with Hsinchu, Taiwan, and Macronix International Co., Ltd. His patent work addresses bubble detection in photoresist delivery systems, helping identify bubbles before the photoresist reaches its output nozzle.
Latest Patents
Tsai is credited with 1 patent: “Bubble Detection System for Detecting Bubbles in Photoresist Tube.” The system includes one or more photoresist tanks, a buffer tank, a pump, a bubble sensor, and a nozzle. Photoresist flows from a tank into the buffer tank, and the pump moves it toward an end terminal. Positioned between the buffer tank and the pump, the sensor detects bubbles and outputs an alarm signal when they are present. The nozzle at the end terminal dispenses the photoresist.
Career Highlights
Tsai’s patented system focuses on monitoring photoresist as it moves through processing equipment. By detecting bubbles before the material reaches the nozzle, the system can alert operators to a condition that may affect delivery.
Collaborations
Tsai’s listed coworkers include Yuh-Tong Tsay and Mao-I Ting. His company affiliation is Macronix International Co., Ltd.
Conclusion
Chung-Te Tsai’s patent describes a practical approach to detecting bubbles in photoresist flow, combining a sensor and alarm with a system for storing, pumping, and dispensing the material.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile