Location History:
- Suwon-si, KR (2004)
- Suwon, KR (2005)
- Gyeonggi-do, KR (2005)
Company Filing History:
Years Active: 2004-2005
Title: Innovations of Chung-Hun Park
Introduction
Chung-Hun Park is a notable inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patents. With a total of 3 patents, Park has established himself as a key figure in the industry.
Latest Patents
One of his latest patents is a polarity exchanger and ion implanter. This invention includes a stripping canal for passing an ion beam, a gas supply unit for providing a stripping gas, and a gas circulation unit for circulating the stripping gas. It also features a flow meter for measuring the flow rate of the stripping gas and an ammeter for measuring the driving current applied to the gas circulation unit. The monitoring unit generates a control signal to manage the process of changing the polarity of the ion beam. This innovation aims to prevent the generation of metallic contaminants caused by variations in the stripping gas flow rate.
Another significant patent is a method and apparatus for measuring the inclination angle of an ion beam during the implantation process into a semiconductor wafer. This invention includes a Faraday cup assembly that is rotatably installed, an angle varying section for adjusting the alignment angle, and an inclination angle measuring section. By accurately measuring the inclination angle, the incident angle of the ion beam can be precisely adjusted, effectively preventing channeling and shadow effects during ion implantation.
Career Highlights
Chung-Hun Park is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative technologies in the semiconductor field. His work has contributed to advancements in ion implantation processes, which are crucial for the manufacturing of semiconductor devices.
Collaborations
Park has collaborated with notable colleagues such as Hyung-Sik Hong and Gyeong-Su Keum. Their combined expertise has fostered a productive environment for innovation and development within their projects.
Conclusion
Chung-Hun Park's contributions to semiconductor technology through his patents demonstrate his commitment to innovation. His work at Samsung Electronics Co., Ltd. continues to influence the industry positively.