This inventor holds 5 USPTO granted patents and 3 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2023-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2023-2026
Title: Innovations of Chun-Kai Chang
Introduction
Chun-Kai Chang is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and performance of conductive structures and control systems in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Conductive structures with bottom-less barriers and liners." This invention involves a blocking material that is selectively deposited on the bottom surface of a back end of line (BEOL) conductive structure. The barrier layer is designed to prevent the diffusion of metal ions while reducing contact resistance. Additionally, the ruthenium layer applied in this process helps to minimize surface roughness within the BEOL conductive structure.
Another significant patent is "Control of dynamic gas lock flow inlets of an intermediate focus cap." This control system utilizes multiple pressure sensors to detect pressure in various dynamic gas lock (DGL) nozzle control regions. The system includes mass flow controllers that adjust flow velocities based on the detected pressures, ensuring optimal performance in semiconductor manufacturing processes.
Career Highlights
Chun-Kai Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has contributed to advancements in manufacturing techniques and has positioned him as a key figure in his field.
Collaborations
Throughout his career, Chun-Kai has collaborated with talented individuals such as Yu Sheng Chiang and Yu De Liou. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Chun-Kai Chang's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile