Chun-Fu Kuo

Title: Inventor Profile: Chun-Fu Kuo

Introduction

Chun-Fu Kuo is an inventor based in Kaohsiung, Taiwan. He has made contributions to the field of semiconductor manufacturing, particularly through his innovative patent application. Although he currently holds no granted patents, his work reflects a commitment to advancing technology in this area.

Latest Patent Applications

Chun-Fu Kuo's notable patent application is titled "SELECTIVE HARDMASK ON HARDMASK." This application discloses a method of manufacturing a semiconductor device. The method includes forming a patterned hardmask over an underlying target layer on a substrate. It also involves performing plasma fabrication operations in parallel on the patterned hardmask and underlying target layer in a plasma etching chamber using a plasma etch gas and a selective source gas. The plasma operations include forming a protective cap on the patterned hardmask and removing portions of the underlying layer that are not covered by the patterned hardmask. In various embodiments, the selective source gas includes a chemical compound that contains a halogen gas that can be dissociated into a metal and a halogen. The plasma operations also include dissociating the metal and the halogen in the selective source gas and forming a protective cap on the patterned hardmask using the dissociated metal.

Conclusion

Chun-Fu Kuo's work in semiconductor manufacturing showcases his innovative approach to technology. His patent application highlights the potential for advancements in the field, even as he currently holds no granted patents. The contributions of inventors like Kuo are essential for the ongoing development of new technologies.