Location History:
- Hsin-Chu, TW (2020)
- Tainan, TW (2019 - 2021)
Company Filing History:
Years Active: 2019-2021
Title: Innovations by Chun-Chin Kang
Introduction
Chun-Chin Kang is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer processing and electrostatic chuck cleaning. With a total of 3 patents to his name, his work has implications for improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Chun-Chin Kang's latest patents include innovative methods and apparatuses that enhance the monitoring and cleaning of wafers. One of his patents, titled "Apparatus and method for monitoring wafer charges," proposes a system that connects the backside surface of a wafer to a sample conductor using a conductive pin, spring, and line. This configuration allows for identical charge density between the wafer and the sample conductor, enabling effective monitoring of charges using a static electricity sensor. This advancement simplifies the apparatus inside the processing chamber and reduces contamination risks.
Another significant patent is the "Method of cleaning electrostatic chuck," which describes a technique for cleaning an electrostatic chuck (ESC) using an ion beam. This method effectively removes depositions from the work surface of the ESC, ensuring that the chucking force remains consistent even when no workpiece is held. The ion beam can be adjusted based on the characteristics of the depositions, allowing for tailored cleaning solutions that protect the dielectric layer of the ESC.
Career Highlights
Chun-Chin Kang is currently associated with Advanced Ion Beam Technology, Inc., where he continues to innovate in the field of ion beam technology. His work has been instrumental in advancing the capabilities of semiconductor manufacturing equipment.
Collaborations
Chun-Chin Kang collaborates with talented individuals such as Yu-Ho Ni and Chih-Chiang Wu, contributing to a dynamic research environment that fosters innovation and development in semiconductor technologies.
Conclusion
Chun-Chin Kang's contributions to the field of semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator. His work not only enhances manufacturing processes but also sets the stage for future advancements in the industry.