Chu-Song Shih

Title: The Innovations of Chu-Song Shih

Introduction

Chu-Song Shih is a notable inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of temperature monitoring and control.

Latest Patents

One of his key patents is titled "Apparatus for the real-time monitoring and control of a wafer temperature." This invention provides a solution for real-time monitoring and control of wafer temperature in semiconductor process chambers, such as plasma-assisted deposition or etch chambers. The apparatus consists of a wafer platform, a heat exchanger for circulating a heat exchanging medium, an optical sensor for detecting the wafer's temperature, and a controller that adjusts the heat exchanger's flow based on the sensor's readings. Additionally, the invention incorporates thermoelectric cooling modules to enhance temperature control capabilities.

Career Highlights

Chu-Song Shih is associated with Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in semiconductor processes. His work has been instrumental in advancing the efficiency and effectiveness of temperature control in semiconductor manufacturing.

Collaborations

He has collaborated with notable colleagues, including Kun-Tzu Lin and Jung-Huang Peng, contributing to various projects within the semiconductor industry.

Conclusion

Chu-Song Shih's innovative work in semiconductor technology, particularly his patent for wafer temperature monitoring, showcases his commitment to advancing the field. His contributions continue to impact the efficiency of semiconductor manufacturing processes.