Christopher W Lee

Title: Christopher W. Lee: Innovator in Tool Matching and Defect Analysis

Introduction

Christopher W. Lee is a notable inventor based in San Ramon, CA. He has made significant contributions to the field of tool matching and defect analysis, holding a total of 4 patents. His innovative approaches have advanced the methodologies used in various industrial processes.

Latest Patents

One of his latest patents is titled "Method for Auto-Learning Tool Matching." This patent describes a method that employs an auto-learning feedback loop to update a library of key parameters. The process involves performing measurements on a control wafer to collect parameters associated with the process or analysis tool being matched. When deviations in parameters correlate to a correctable tool condition, these parameters are added to the library. This methodology allows for more frequent tool matching by monitoring an automatically updated list of key parameters.

Another significant patent is "Process Excursion Detection." This method analyzes defect information on a substrate by logically dividing it into zones and detecting defects to produce defect information. The analysis is conducted on a zone-by-zone basis, producing defect level classifications for each zone. The classifications are analyzed using various methods, including zonal defect distribution and automatic defect classification. This approach enhances the understanding of defects and their implications on the substrate.

Career Highlights

Christopher W. Lee is currently employed at Kla Tencor Corporation, where he continues to innovate in the field of semiconductor manufacturing. His work has been instrumental in improving the efficiency and accuracy of defect detection and tool matching processes.

Collaborations

Throughout his career, Christopher has collaborated with notable colleagues, including Patrick Huet and Robinson Piramuthu. These collaborations have fostered a productive environment for innovation and development in their respective fields.

Conclusion

Christopher W. Lee's contributions to tool matching and defect analysis have made a significant impact in the industry. His innovative patents and collaborative efforts continue to drive advancements in semiconductor manufacturing processes.