Company Filing History:
Years Active: 2019-2020
Title: Christopher Ausschnitt: Innovator in Semiconductor Metrology
Introduction
Christopher Ausschnitt is a notable inventor based in Heverlee, Belgium. He has made significant contributions to the field of semiconductor manufacturing, particularly in metrology methods. With a total of 3 patents to his name, his work is instrumental in advancing the precision of semiconductor devices.
Latest Patents
One of his latest patents focuses on a metrology method for a semiconductor manufacturing process. This method and apparatus are designed to monitor critical dimensions in patterns of 1-dimensional and/or 2-dimensional features produced on a substrate. The process is part of or related to manufacturing semiconductor devices, performed according to a predefined pattern design. The invention includes the addition of metrology targets to the pattern design, which consist of asymmetric metrology marks. Each version of the mark includes a uniform portion and a periodic portion, which can be a regular array of parallel line-shaped features or an array of 2-dimensional features. The design width of these features is situated around a nominal design width. A position-related parameter is defined that is essentially proportional to the design widths in the range. By determining the shift of this parameter with respect to a predefined process operating point, it becomes possible to assess the critical dimensions of the features produced.
Career Highlights
Christopher currently works at Imec Vzw, a leading research and innovation hub in nanoelectronics and digital technologies. His role involves developing advanced metrology techniques that enhance the manufacturing processes of semiconductor devices. His expertise in this area has positioned him as a key player in the industry.
Collaborations
Christopher collaborates with various professionals in his field, including his coworker Vincent Truffert. Their combined efforts contribute to the innovative projects at Imec Vzw, pushing the boundaries of semiconductor technology.
Conclusion
Christopher Ausschnitt's work in semiconductor metrology exemplifies the importance of innovation in technology. His patents and contributions are vital for the advancement of precision in semiconductor manufacturing processes.