This inventor holds 3 USPTO granted patents and 1 published patent application and 1 EPO patent. Top assignee: Lam Research Ag. Active years: 2016-2023.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Klagenfurt, AT (2016 - 2019)
- Villach, AT (2023)
Company Filing History:
Years Active: 2016-2023
Title: Christoph Semmelrock: Innovator in Wafer Cleaning Technologies
Introduction
Christoph Semmelrock is a notable inventor based in Klagenfurt, Austria. He has made significant contributions to the field of wafer cleaning technologies, holding a total of 3 patents. His innovative approaches have advanced the methods used in semiconductor manufacturing.
Latest Patents
One of Semmelrock's latest patents is a "Wafer cleaning method and apparatus therefore." This invention relates to a method for treating the surface of a wafer with multiple liquids. It involves rotating the surface of the wafer and discharging different liquid streams onto the rotating surface in a sequence from separate outlets. The discharge of liquid streams that are contiguous in the sequence overlaps during a transition phase, allowing the liquid streams to merge after exiting the outlets to form a merged liquid stream before impacting the rotating surface.
Another significant patent is the "Device and method for removing liquid from a surface of a disc-like article." This device comprises a spin chuck for holding and rotating a single disc-like article about an axis of rotation. It includes a liquid dispenser for dispensing liquid onto the disc-like article, along with gas dispensers that blow gas onto the disc-like article. The design allows for efficient removal of liquid from the surface, enhancing the cleaning process.
Career Highlights
Christoph Semmelrock is currently employed at Lam Research AG, a company known for its advanced semiconductor manufacturing equipment. His work at Lam Research AG has positioned him as a key player in the development of innovative cleaning technologies for wafers.
Collaborations
Throughout his career, Semmelrock has collaborated with talented individuals such as Karl-Heinz Hohenwarter and Vijay Kumar Badam. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies.
Conclusion
Christoph Semmelrock's contributions to wafer cleaning technologies have made a significant impact in the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile