This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Ag. Active years: 2014-2016.
Location History:
- Weisenstein, AT (2014)
- Weissenstein, AT (2016)
Company Filing History:
Years Active: 2014-2016
Title: Innovations by Christian Aufegger in Wafer Processing Technology
Introduction
Christian Aufegger is an accomplished inventor based in Weissenstein, Austria. He has made significant contributions to the field of wafer processing technology, holding a total of 2 patents. His innovative designs focus on improving the efficiency and effectiveness of processing wafer-shaped articles.
Latest Patents
Christian Aufegger's latest patents include a device and method for processing wafer-shaped articles. The first patent describes a device that features a spin chuck for holding and rotating a wafer-shaped article around a rotation axis. It also includes a dispenser for applying liquid onto the surface of the wafer. A liquid collector surrounds the spin chuck, designed to collect liquid spun off during rotation, with multiple collector levels for separating different liquids. Additionally, the device incorporates a lifting mechanism to adjust the spin chuck's position relative to the liquid collector, along with exhaust levels for gas collection.
The second patent also focuses on processing wafer-shaped articles. It describes a chuck that receives a wafer-shaped article, surrounded by a collector with a base and divider walls. This collector features nested partitions that can be vertically adjusted to create separate processing regions. One of the divider walls includes an internal exhaust conduit that connects to an underlying exhaust duct, enhancing the device's functionality.
Career Highlights
Christian Aufegger is currently employed at Lam Research AG, a company known for its advanced semiconductor manufacturing equipment. His work at Lam Research AG has allowed him to develop and refine his innovative technologies in wafer processing.
Collaborations
Christian has collaborated with notable coworkers, including Reinhold Schwarzenbacher and Ante Plazonic. Their combined expertise contributes to the advancement of technologies in the semiconductor industry.
Conclusion
Christian Aufegger's contributions to wafer processing technology through his patents and work at Lam Research AG highlight his role as a significant innovator in the field. His inventions are poised to enhance the efficiency of semiconductor manufacturing processes.