Chris Gage

Title: Chris Gage: Innovator in Wafer Processing Technology

Introduction

Chris Gage is a notable inventor based in Campbell, CA (US), recognized for his contributions to wafer processing technology. With a total of 6 patents to his name, Gage has made significant advancements in methods and apparatuses that enhance the efficiency and effectiveness of wafer temperature control.

Latest Patents

Among his latest patents is the "Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation." This invention provides methods that decouple wafer temperature from pre-heat station residence time, thereby improving wafer-to-wafer temperature uniformity. The methods involve maintaining a desired temperature by varying the distance between the wafer and a heater. In certain embodiments, a heated pedestal supplies the heat, and the wafer-pedestal gap may be modulated by moving the heated pedestal or the wafer itself. Additionally, the closed loop control system includes a real-time wafer temperature sensor and a servo-controlled linear motor for precise adjustments.

Another significant patent is "Loadlock designs and methods for using same." This invention includes apparatuses and methods for wafer processing, featuring dual wafer handling systems that efficiently transfer wafers from storage cassettes to processing modules. The design incorporates stacked independent loadlocks that allow venting and pumping operations to work in parallel, optimizing particle reduction during the process.

Career Highlights

Chris Gage has made a remarkable impact in the field of semiconductor manufacturing through his innovative designs and methods. His work at Novellus Systems Incorporated has positioned him as a key player in advancing wafer processing technologies.

Collaborations

Gage has collaborated with notable colleagues, including Damon Tyrone Genetti and Shawn M Hamilton, contributing to the development of cutting-edge technologies in the industry.

Conclusion

Chris Gage's innovative contributions to wafer processing technology have significantly advanced the field, showcasing his expertise and dedication to improving manufacturing processes. His patents reflect a commitment to enhancing efficiency and precision in semiconductor technology.