The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Nov. 30, 2007
Chris Gage, Campbell, CA (US);
Shawn Hamilton, Boulder Creek, CA (US);
Sheldon Templeton, San Jose, CA (US);
Keith Wood, Sunnyvale, CA (US);
Damon Genetti, Livermore, CA (US);
Chris Gage, Campbell, CA (US);
Shawn Hamilton, Boulder Creek, CA (US);
Sheldon Templeton, San Jose, CA (US);
Keith Wood, Sunnyvale, CA (US);
Damon Genetti, Livermore, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
Provided are apparatuses and methods disclosed for wafer processing. Specific embodiments include dual wafer handling systems that transfer wafers from storage cassettes to processing modules and back and aspects thereof. Stacked independent loadlocks that allow venting and pumping operations to work in parallel and may be optimized for particle reduction are provided. Also provided are annular designs for radial top down flow during loadlock vent and pumpdown.