Chou Feng Li

Title: Chou Feng Li: Innovator in Dry Etching Technologies

Introduction

Chou Feng Li is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of dry etching technologies. His innovative work has led to advancements that enhance the efficiency and yield of semiconductor production.

Latest Patents

Chou Feng Li holds a patent for "Methods and systems for dry etching." This patent describes a system that includes a wafer clamp ring with a central opening for substrate treatment and a series of smaller, outer support holes designed to receive pins from plunger assemblies. The tapered design of the outer support holes minimizes horizontal shifting of the wafer clamp ring during operational use, ultimately increasing wafer yield along the edges.

Career Highlights

Chou Feng Li is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this esteemed company has allowed him to apply his innovative ideas in a practical setting, contributing to the advancement of semiconductor technologies.

Collaborations

Chou has collaborated with notable colleagues, including Fu-Yi Liu and Chih-Hsien Hsu. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies in the semiconductor field.

Conclusion

Chou Feng Li's contributions to dry etching technologies exemplify the impact of innovation in the semiconductor industry. His patent and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key inventor in advancing manufacturing processes.