Company Filing History:
Years Active: 2023-2025
Title: Innovations of Cho-Ying Lin
Introduction
Cho-Ying Lin is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of lithography, particularly in the semiconductor manufacturing industry. With a total of 7 patents to his name, Lin's work has been instrumental in advancing lithography technologies.
Latest Patents
Among his latest patents, Lin has developed methods for cleaning a lithography system. This method involves removing debris on a collector of lithography equipment by altering the physical structure of the debris using a cleaner. The process includes forming a cleaned collector by exhausting the removable debris and creating openings in a mask layer on a substrate by removing regions of the mask layer that are exposed to radiation from the cleaned collector. Another notable patent focuses on lithography thermal control. This innovation provides a light source capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The system includes a processor, a droplet generator for creating extreme ultraviolet light, a collector for reflecting this light, a light generator for producing pre-pulse and main pulse light, and a thermal image capture device for capturing thermal images from the collector's reflective surface.
Career Highlights
Cho-Ying Lin is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to apply his innovative ideas and contribute to the advancement of lithography technologies.
Collaborations
Lin has collaborated with notable colleagues such as Tai-Yu Chen and Chieh Hsieh. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies in the field.
Conclusion
Cho-Ying Lin's contributions to lithography and semiconductor manufacturing are noteworthy. His innovative patents and collaborations highlight his role as a key figure in advancing technology in this critical industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.